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Desk-top Magnetron Sputtering System

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This equipment is a double target magnetron coating instrument, which can be used for the preparation of metal film, in the field of electronics, optics, special ceramic preparation and other fields. It can also be used for the preparation of SEM samples in the laboratory.


High vacuum stainless steel chamber, front door design, quartz observation window on the door, easy to observe and record the experiment. At the same time, the equipment is equipped with a rotary heating sample table, which can effectively improve the uniformity of the film and the quality of the film. A set of baffle is installed on the top cover, which can switch two targets by turning the baffle to realize multilayer coating.


This equipment needs to be used together with high vacuum molecular pump set. Users can choose imported brand small molecular pump to further save installation area.


The product can be equipped with film thickness meter components, which can monitor the film thickness data in real time and provide reliable parameters for the experimental process.


VoltageAC220V, 50Hz
Chamber materialstainless steel
Cooling modeWater cooling
Chamber sizeφ210mm X 260mm
Magnetron sputtering gun2inch x2
Heating temperature≤500℃
Molecular pumpFront stage pump: rotary vane pump; pumping speed: 1.1l/s
Secondary pump: turbomolecular pump (domestic): pumping speed: 600L/S
Air extrac:KF40
Air outlet:KF16


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